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Lithography for VLSI
by
Norman G. Einspruch
Publisher:
Academic Press
Print ISBN:
9780122341168, 0122341163
eText ISBN:
9781483217826, 1483217825
Copyright year:
1987
Lithography for VLSI Edition by Norman G. Einspruch and Publisher Academic Press. Save up to 80% by choosing the eTextbook option for ISBN: 9781483217826, 1483217825. The print version of this textbook is ISBN: 9780122341168, 0122341163.