MEMS in der Mikrosystemtechnik
Aufbau, Wirkprinzipien, Herstellung und Praxiseinsatz mikroelektromechanischer Schaltungen und Sensorsysteme

Cover image: MEMS in der Mikrosystemtechnik 9783519005209
  • Author(s)
    Markus Glück
  • Publisher
    Vieweg+Teubner Verlag
  • Format
    Fixed
  • Print ISBN 9783519005209, 3519005204
  • eText ISBN 9783663107781, 3663107787
  • Copyright
    2005
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MEMS in der Mikrosystemtechnik: Aufbau, Wirkprinzipien, Herstellung und Praxiseinsatz mikroelektromechanischer Schaltungen und Sensorsysteme is written by Markus Glück and published by Vieweg+Teubner Verlag. The Digital and eTextbook ISBNs for MEMS in der Mikrosystemtechnik are 9783663107781, 3663107787 and the print ISBNs are 9783519005209, 3519005204. Save up to 80% versus print by going digital with VitalSource.

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