Microfabrication and Nanomanufacturing

  • Author(s): Mark J. Jackson
  • Publisher: CRC Press
  • Copyright year: © 2005
  • Edition: 1st
  • Print ISBN: 9780824724313, 0824724313
  • eText ISBN: 9781420028270, 1420028278
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  • Print ISBNs: 9781441938459, 9780387507170, 9780387258744, 1441938451, 0387507175, 0387258744
  • eText ISBNs: 9781280949098, 9781280652653, 9780387261324, 1280949090, 1280652659, 038726132X