Optical Inspection of Microsystems

  • Author(s): Wolfgang Osten
  • Publisher: CRC Press
  • Copyright year: © 2006
  • Edition: 1st
  • Print ISBN: 9780849336829, 0849336821
  • eText ISBN: 9781420019162, 1420019163
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  • eText ISBNs: 9781281095183, 1281095184