Handbook of Silicon Semiconductor Metrology

  • Author(s): Alain C. Diebold
  • Publisher: CRC Press
  • Copyright year: © 2001
  • Edition: 1st
  • Pages: 894
  • Print ISBN: 9780824705060, 0824705068
  • eText ISBN: 9780203904541, 0203904540
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  • eText ISBNs: 9786610208449, 9781280208447, 6610208441, 1280208449