Foundations of MEMS

  • Author(s): Chang Liu
  • Publisher: Pearson
  • Copyright year: © 2012
  • Edition: 2nd
  • Pages: 560
  • Print ISBN: 9780132497367, 0132497360
  • eText ISBN: 9780133464788, 0133464784
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  • Other: 9780133002515, 9780132497398, 0133002519