Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

  • Author(s): Marc J. Madou
  • Publisher: CRC Press
  • Copyright year: © 2011
  • Edition: 1st
  • Print ISBN: 9781420055115, 1420055119
  • eText ISBN: 9781439891810, 1439891818

Description